JPH03124633U - - Google Patents
Info
- Publication number
- JPH03124633U JPH03124633U JP3240790U JP3240790U JPH03124633U JP H03124633 U JPH03124633 U JP H03124633U JP 3240790 U JP3240790 U JP 3240790U JP 3240790 U JP3240790 U JP 3240790U JP H03124633 U JPH03124633 U JP H03124633U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- wafer
- section
- soaking section
- heat treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002791 soaking Methods 0.000 claims 4
- 235000012431 wafers Nutrition 0.000 claims 4
- 238000010438 heat treatment Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3240790U JPH03124633U (en]) | 1990-03-28 | 1990-03-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3240790U JPH03124633U (en]) | 1990-03-28 | 1990-03-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03124633U true JPH03124633U (en]) | 1991-12-17 |
Family
ID=31535382
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3240790U Pending JPH03124633U (en]) | 1990-03-28 | 1990-03-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03124633U (en]) |
-
1990
- 1990-03-28 JP JP3240790U patent/JPH03124633U/ja active Pending